www.sensirion.com october 2016 C v1 1 / 10 datasheet sfc5300 / sfm53 00 mass flow controller / meter for gases product information october 2016 C v 1 ? ultra - fast settling time ( down to 50 ms) ? excellent accuracy / repeatability ( 2 % s.p. / 0. 2 % s.p. respectively) ? wide control range (1000:1) ? two digital interfaces: rs485 , io - link ? compact downmount footprint ? multiple gases and gas recognition ? nist traceable calibration unsurpassed cmosens? t echnology the sfc 5300 / sfm 5300 series continues sensirion s pioneering work in mems - based mass flow controllers and meters: the heart of this product is the unsurpassed sensirion cmosens? technology. it combines a high precision sensor element with state of the art signal processing on a single chip and thereby providing a n accurately calibrated and temperature compensated signal (see fig ure 1). thanks to this sensor technology, the sfc 5300 achieves unmatched ratings for speed, accuracy and repe atability . in addition, no recalibration is needed due to the inherent longterm stability of the cmosens? technology. the sfc 5300 offers fastest settling time, high control range as well as high flexibility regarding mechanical connector s and communication interfaces. digital versions also provide optional smart features like multiple gases and range s , gas recognition and self - test capability. the sfm 5300 is the valve - free flow me ter based on the sfc 5300 mass flow controller. it features the same performance advantages and configurations as the mfc counterpart without providing the controller functionality . the brilliant performance of the sfc 5300 / sfm 5300 products makes them t he best choice for a wide range of applications, such as analytical instrument ation , medical equipment and general process automatio n to name a few. figure 1 : cmosens? flow sensor diagram . sfc5300
www.sensirion.com october 2016 C v1 2 / 10 figure 2 : block diagram cmosens ? sfc 5300 mass flow c ontroller. introduct ory description the cmosens ? based sfc 5300 / sfm 5300 measure the gas mass flow by the calorime tric principle base d on heat transfer. a heating element on a thermally insulated membrane is kept above ambient temperature. in the presence of gas flow, the temperature distribution up - and downstream is disturbed. this asymmetry is then measured. the whole arrangement is real ized on a silicon chip using cmos standard processes (see figure 3 ) . mems based cmosens ? technology enables a large r cross section (about 1.5x1 mm 2 ) of the gas channel than bypass capillary diameter in conventional mass flow controllers (0.1 to 0.5 mm). this cha nnel design makes the device more robust against particles, clogging and humidified gases. due to the compact single - chip design and its mount ing between meta l parts , cmosens ? based sensors are very resistant to electromagnetic disturbances (emc). the minimal thermal mass of the membrane results in an ultra - fast sensor response time of 3 - 4 ms. since the whole design of the amplification, a/d c onversion, digital linearization and temperature compensation is matched to that sensor speed, a fully compensated flow measurement value can be delivered every millisecond. combined with advanced control algorithm s running on an on - board micropro cessor, t he sfc 5300 offers greatly reduced settling time s compared to conventional mass flow controllers (see figure 2 ) . furthermore, a special arrangement of the two temperature sensors, the on - chip temperature compensation and the minimizing of noise sources lead to the unbeatable performance with regard to repeatabili ty and accuracy over a large dynamic range. thanks to its flawless desi gn, the sfc 5300 / sfm 5 300 mass flow controllers / met ers show zero - drift perfor - mance and control / measure true mass flow inde - pendently of the ambient temperature and pressure changes. figure 3 : cross - sectional view of gas channel. digital interface
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 3 / 10 1 cmosens ? specification value unit full scale flow (n 2 equivalent) 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10 l n /min or slm accuracy 1 whichever is greater 2 % s.p. 2 0.2 % fs repeatability whichever is greater 0.1 % s.p. 0.01 % fs typical settling time 3 100 (50 on request ) ms measurement f requency 1000 hz control r ange 4 better than 1 000 :1 standard calibration g ases air/n 2 , h 2 , o 2 , he, ar, co 2 calibration s using gas c onversion 5 (on request) sf 6 , c 4 f 8 , cf 4 , nh 3 , sih 4 , n 2 o, o 3 , co, ch 4 , ch 3 f, xe, ne , kr + other gases and mixtures on request (not compatible with aggressive gases, see wetted material list or contact sensirion ) operating t emperature (ambient and gas) 0 C 50 / 32 C 122 c / f temp. coeff. z ero 0.005 % fs / c temp. coeff. s pan 0.06 % s.p. / c pressure drop at full flow sfc 5300 sfm 5300 < 2.0 / 29 < 0.1 / 1.5 bar / psig maximum input p ressure 6 10 / 145 bar / psig maximum differential pressure 7 5 / 73 bar / psig leak i ntegrity mfc external 9 x 10 - 9 mbar l/s he warming up t ime 8 1 sec weight short / long version 140 / 171 g 1 including offset, non - linearity and hysteresis. measured against nist traceable reference 2 in % of set point (s.p.) = measured value (m.v.) = rate = reading 3 step answer from 10% to 100% of full scale within ? 5 % of set point 4 specification is valid for mass flow controller only 5 gas conversion is generated from the real gas calibration data using the combination of standard gases. typical accuracy is 2 % m.v. / 0.2% fs (whichever is greater). please contact sensirion if better accuracy specification is required 6 pressure between flow inlet and ambient 7 pressure between flow inlet and flow outlet. for availability of higher differential pressure option, contact sensirion 8 to within ? 2 % of set point table 1 : overview of cmosens ? sfc 5300 / sfm 5300 mass flow controller / meter specifications all data, unless otherwise noted, apply for the following calibration condi tions : temperature 20c, nitrogen (n2), 3.0 bar overpressure (inlet: 4.0 bar absolute) against atmosphere (outlet: 1.0 bar absolute), h orizontal mounting position (electric connector on top), downmount connection
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 4 / 10 1.1 accuracy figure 4 compares the set point accuracy of a conventional mass flow controller / meter with a cmosens ? sfc 5300 / sfm 5300 . typically, an accuracy of 1% fs (full scale) is stated for mass flow controllers using conventional sensor technology. the graph shows this in relation to the accuracy of the sfc 5300 mass flow controller. it can be seen that especially at low flow rates the cmosens ? technology reaches superior performance. figure 4 : accuracy comparison of the cmosens? sfc 5300 / sfm 5300 device compared to a typical thermal ma ss flow controller / meter. 1.2 r epeatability figure 5 : r epeatability comparison of the cmosens? sfc 5300 / sfm 5300 device compared to a typical thermal mass flow controller/meter. 1.3 s ettling t ime the cmosens ? sfc 5300 mass flow controller has an ultra - fast settling time . figure 6 shows the typical response time of the sfc 5300 in comparison to a mass flow controller using conventional sensor technology. figure 6 : settling time of the sfc 5300 vs. typical thermal mass flow controller. 1.4 wide control range ultra - wide control range of the sfc 5300 brings a decisive benefit in applications with a wide dynamic range of gas flows. instead of two devices used for high flow and low flow ranges, a single sfc 5300 device can efficiently cover a flow range of three orders of magnitude. 1.5 multiple gases, ranges & g as recognition t he new sfc 5300 / sfm 5300 can be equipped with m ultigas feature allowing swit ching between a set of gas calibrations saved in the device memory . similarly, different ranges for the same gas can be stored. another interesting feature is gas recognition. it allows performing a check whether the activated gas calibration matches the media in the gas line. this is a safety feature which prevents wrong operation due to mistake of user etc.
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 5 / 10 2 construction d etails packaging principle and sealing 2.1 to guarantee a vacuum proof housing of the sensor and the flow path, several patented technologies are used. the cmosens ? chip itself is placed vacuum tight in a stainless steel package that is connected via o - ring sealing to the alumin i um body. the packagi ng allows the sfc 5300 / sfm 5300 mass flow controller / meter to operate under high input pressure conditions (up to 10 bar / 145 psi standard). the electrical connection from the chip to the main controller board is realized using vacuum tight glass feed through pins. this chosen packaging method ensures high reliability and tightness for all kinds of gases (see figure 7 below ). figure 7 : va cuum tight glass feed through (l ongitudinal v iew) wetted materials & c ompatibility 2.2 the packaging method ensures that a minimum number of inert materials are wetted by the media. table 2 gives an overview of the materials wetted by the gas. for high volume applications different specialized materials for body, valve and sealing can be used. part wetted material body aluminum stainless s teel or plastic on request sensor element silicon (si) silicon oxide (siox) silicon nitride (si 3 n 4 ) stainless s teel glass glob t op sealing fkm epdm / ffkm on request valve brass, fkm stainless s teel, epdm / ffkm on request safety i nstructions 2.3 toxic gases 2.3.1 the whole gas assembly must be checked for leakage before applying toxic gas to the device. aggressive or corrosive gases 2.3.2 please make sure that the gases you use are compatible with the wetted materials listed in this chapter. in case of doubt please contact sensirion for further ad vice. explosive gases 2.3.3 the maximum heating energy of the sensor is limited to 12 mw in every circumstance, even in the case of a failure . the cmosens? sensor element is tested according to en 50020 chapter 6.2.4 b). sensirion guarantees the safe use of ga ses of the classes t1 or t2 (ignition temperature < 300 c). this includes also mixtures of air or oxygen with hydrogen or hydrocarbons. however, the sfc 5300 / sfm 5300 are not designed for the use in hazardous areas (en 60 0 79 - 10) where explosive gases can occur outside of the device. table 2 : overview of wetted materials. s tandard configuration materials are shown in bold text. optional materials a re provided for large projects only .
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 6 / 10 3 electrical and c ommunication s pecifications connector and pin layout 3.1 sfc 5300 / sfm 5300 feature two digital interfaces: r s485, io - link . detailed specification of the digital communication protocols can be found on the sens irion website. the electrical connector of the sfc 5300 / sfm 5300 is a standard sub - d 9pin. this enables an easy and reliable universal connection. see the pin layouts for different interface versions below: figure 8 : di gital interface (rs485 a nd io - link) power supply 3.2 the sfc 5300 / sfm 5300 mass flow controller / meter require a standard voltage supply of +14.0 to + 26.0 vdc. t here are no stringent requirements for voltage rip ple and stability because of the internal vo ltage regulation. electrical s pecifications 3.3 parameter conditions units analog and digital versions supply voltage range (vdd) typ 15.0 C 24.0 max 14.0 C 26.4 vdc electrical connector d - sub 9pin (female on device) parameter conditions typical value (within +/ - 5%) units flow range equal and below 500 sccm n2 equivalent max. supply current vdd = 15 / 24 vdc 120 / 75 ma standby current vdd = 15 / 24 vdc 50 / 35 ma flow range higher than 500 sccm n2 equivalent max. supply current vdd = 15 / 24 vdc 320 / 200 ma standby current vdd = 15 / 24 vdc 50 / 35 ma mass flow meter sfm 5300 typical vdd = 15 / 24 vdc 50 / 35 ma parameter hall mark notes applied values electromagnetic compatibility / immunity in industrial environment: (en 61000 - 6 - 2) en 61000 - 4 - 2 air discharge (esd) ? 8 kv (air) ? 4 kv (contact) en 61000 - 4 - 6 high frequency electromagnetic radiation (hf) 10 v eff en 61000 - 4 - 4 fast transients (burst) ? 4 kv table 3 : electrical characteristics table 4 : current consumption table 5 : electromagnetic compatibility not connected not connected
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 7 / 10 4 physical d imensions and m ounting i nformation for sfc 5300 / sfm 5300 sfc5300 / SFM5300 come in two down mount variants: a shorter variant (top panel) with two downward facing screw threads and a longer variant (bottom panel) with four screw holes. ----------------------------------------------------------------------------------------------------------------------------- ------------------------------ 3)
www.sensirion.com october 2016 C v1 8 / 10 5 supported flow u nits typical flow unit reference condition gas temperature gas pressure mln/min (norm milliliter per minute) 0 c / 32 f 1013 mbar / 14.69 psi ln /min (norm liter per minute) sccm (standard cubic centimeter per minute) 20 c / 68 f slm (standard liter per minute) example: relationship for n 2 between: ln/min (0c, 1013 mbar) and slm (20c / 68f, 1013 mbar / 14.69) 1 ln/min = 1.073 slm 10 ln/min = 10.73 slm 6 revision history date version page(s) changes september 2016 v1 all table 6 : units for gas flow rates
cmosens ? sfc5 3 00 / sfm5 3 00 mass flow controller / meter for gases www.sensirion.com october 2016 C v1 9 / 10 important n otices warning, personal injury do not use this product as safety or emergency stop device or in any other application where failure of the product could result in personal injury. do not use this product for applications other than its intended and authorized use. before installing, handling, using or servicing this product, please consult the data sheet and application notes. failure to comply with these instructions could result in death or serious injury. if the buyer shall purchase or use sensirion products for any un intended or unauthorized application, buyer shall defend, indemnify and hold harmless sensirion and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if sensirion shall be allegedly negligent with respect to the design or the manufacture of the product. esd p recautions the inherent design of this component causes it to be sensitive to electrostatic discharge (esd). to prevent esd - induced damage and/or degradation, take customary and statutory esd precautions when handling this product. warranty sensirion warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in sensirions published specifications of the pr oduct. within such period, if proven to be defective, sensirion shall repair and/or replace this product, in sensirion s discretion, free of charge to the buyer, provided that: ? notice in writing describing the defects shall be given to sensirion within fou rteen (14) days after their appearance; ? such defects shall be found, to sensirions reasonable satisfaction, to have arisen from sensirions faulty design, material, or workmanship; ? the defective product shall be returned to sensirions factory at the b uyers expense; and ? the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. this warranty does not apply to any equipment which has not been installed and used within the specifications rec ommended by sensirion for the intended and proper use of the equipment. except for the warranties expressly set forth herein, sensirion makes no warranties, either express or implied, with respect to the product. any and all warranties, including without l imitation, warranties of merchantability or fitness for a particular purpose, are expressly excluded and declined. sensirion is only liable for defects of this product arising under the conditions of operation provided for in the data sheet and proper use of the goods. sensirion explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. sensirion does not assume any liability arising out of any ap plication or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. all operating parameters, including without limitation recommended parameters, must be validated for each customers applications by customers technical experts. recommended parameters can and do vary in different applications. sensirion reserves the right, without further notice, (i) to change the product specifications and/or the information in thi s document and (ii) to improve reliability, functions and design of this product. copyright ? 2001 - 2016 , sensirion. cmosens ? is a trademark of sensirion all rights reserved
www.sensirion.com october 2016 C v1 10 / 10 fcc and ce s tatement the sfc 5300 and sfm 5300 products have been tested and found to comply with the limits for a class b digital device, pursuant to part 15 of the fcc rules (fcc cfr 47). these limits are designed to provide reasonable protection a gainst harmful interference in a residential installation. this equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions, may cause harmful interference to radio communications. how ever, there is no guarantee that interference will not occur in a particular installation. if this equipment does cause harmful interference to radio or television reception, which can be determined by turning the equipment off and on, the user is encourag ed to try to correct the interference by one o r more of the following measures: ? reorient or relocate the receiving antenna. ? increase the separation between the equipment and the receiver ? connect the equipment into an outlet on a circuit different from that to which the receiver is connected. ? consult a dealer or an experienced radio/tv technician for help. the cmosens ? sfc 5300 / sfm 5300 devices fully comply with norm en 61000 - 6 - 1 to en 61000 - 6 - 4 (immunity and emission test series). headquarters and s ubsidiaries sensirion ag laubisruetistr. 50 ch - 8712 staefa zh switzerland phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com sensirion inc., usa phone: +1 805 409 4900 info_us@sensirion.com www.sensirion.com sensirion japan co. ltd. phone: +81 3 3444 4940 info@sensirion.co.jp www.sensirion.co.jp sensirion korea co. ltd. phone: +82 31 345 0031 3 info@sensirion.co.kr www.sensirion.co.kr sensirion china co. ltd. phone: +86 755 8252 1501 info@sensirion.com.cn www.sensirion.co.cn sensirion ag (germany) phone: +41 44 927 11 66 info@sensirion.com www.sensirion.com to find your local representative, please visit www.sensirion.com/contact
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